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Surface Finish Metrology

Biography

Dr. Peter de Groot is Director of Research and Development at ZYGO, specializing in optical instrumentation invention and design. Peter is a physics PhD with experience in academic and commercial environments, specializing for the last 25 years in optical instrumentation invention and design. Peter is an author for 130 technical papers and 120 US patents. He is an SPIE Fellow and active member of the applied optics community.

Eric Felkel is Product Manager for non-contact Optical Profilers at ZYGO. Eric has been with Zygo for more than 13 years with roles in application engineering and customer support, profiler product development, and product management. Eric obtained a BS degree in optics from the University of Rochester and an MBA from Norwich University. He has 15 years of experience in optics, metrology and product line management.

Session Title: Non-contact Interferometric Surface Metrology

We begin with a review of the theory of operation of interferometers and interference microscopes in particular, using language and visuals accessible to a broad audience. A survey of instruments takes us through automated phase shifting systems and coherence scanning interferometers—presently the most widely used microscope for general-purpose surface profiling on the microscope scale. Armed with this background, we proceed to applications, best practice, data interpretation and presentation, facilitated by hands-on demonstration of a state of the art instrument for 3D surface topography measurement.

Session Date and Time

Thursday, January 24, (Morning) 10:00am - noon and (Afternoon) 1:00pm - 3:00pm

REGISTRATION

Please mail/fax/email the completed registration form and payment to:

Dr. Chittaranjan Sahay (Director)
Center for Manufacturing and Metrology
College of Engineering, Technology, and Architecture
University of Hartford
200 Bloomfield Avenue, West Hartford CT 06117

Email: sahay@hartford.edu

Fax: 860.768.5073

Phone 860.768.4852



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